| Item |
Specifications |
| Movement method |
XY-axis movement: Flying optic method Z-axis movement: Linear motor drive |
| Control method |
X-Y-Z simultaneous 3-axis control (Z axis height control is also possible) |
| Rapid feedrate (m/min) |
Max. 120 (max. 48 in manual mode) |
| Processing feedrate (m/min) |
Max. 60 |
| Positioning accuracy (mm) |
0.05/500 (X,Y axes) 0.1/100 (Z axis) |
| Repeatable accuracy (mm) |
+/- 0.01 (X,Y axes) |
| Processing head |
Autofocus preset head |
| Input (kVA) |
102 |